X/Y/Z measuring stroke | 500╳400╳200mm |
Z-axis travel | Focusing stroke 200mm (height can be customized according to customer requirements) |
glass table size | 580╳480mm |
Glass table load-bearing | 30kg |
Metal patch optical ruler | X/Y axis resolution: 0.0005mm (0.5μm, optional 0.1μm) |
Z-axis resolution: 0.0005mm (0.5μm, optional 0.1μm) | |
X/Y linear measurement accuracy (μm) | ≤3+L/200 |
Machine positioning accuracy (μm) | ≤3 |
Repeatability (μm) | ≤3 |
camera | Ultra-clear color industrial digital camera |
Measurement software | Self-developed automatic imaging software (measurement data can be exported or imported into MES, QMS system according to customer report format) |
Light source system | Surface light source: 5-ring 8-zone LED cold light source, 255-level independent adjustment |
Contour light source: LED green cold light source, 255-level independent adjustment | |
Dimensions of the instrument (L*W*H) | 1230╳820╳1850mm |
Instrument weight (kg) | 400kg (to ensure the stability of the machine during high-speed operation) |
power supply | AC220V/50HZ AC110V/60HZ |
computer | intel i5 host |
monitor | 27 inches |
Warranty | 1 year warranty for the whole machine |
video card | intel gigabit network card |
switch | 12V-24V, leakage and short circuit protection |
power filter | A total of 3 sets of independent filters for X, Y and Z (anti-current interference) |